An example of a correlative study between XRM and FIB-SEM has been presented in an earlier study. 1 This article will expand the correlation one step beneath the length scale to link FIB-SEM and TEM, ...
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CD-SEM, the workhorse metrology tool used by fabs for process control, is facing big challenges at 5nm and below. Traditionally, CD-SEM imaging has relied on a limited number of image frames for ...
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